Realization of MEMS based silicon cantilever using Bulk Micromachining
| dc.contributor.author | Kataria, Devika | |
| dc.date.accessioned | 2018-07-18T12:05:17Z | |
| dc.date.available | 2018-07-18T12:05:17Z | |
| dc.date.issued | 2017 | |
| dc.description.abstract | A research paper on Realization of MEMS based silicon cantilever using Bulk Micromachining. | en_US |
| dc.identifier.citation | Devika Kataria. Realization of MEMS based silicon cantilever using Bulk Micromachining. Presented in the conference on "Recent Innovations in Signal Processing and Embedded Systems RISE 2017" | en_US |
| dc.identifier.uri | http://hdl.handle.net/123456789/3502 | |
| dc.language.iso | en | en_US |
| dc.publisher | MANIT Bhopal, IEEE and ESIEE France | en_US |
| dc.subject | silicon cantilever, Micromachining | en_US |
| dc.title | Realization of MEMS based silicon cantilever using Bulk Micromachining | en_US |
| dc.title.alternative | Recent Innovations in Signal Processing and Embedded Systems RISE 2017 | en_US |
| dc.type | Article | en_US |